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Defect characterization of 4H-SiC wafers for power electronic device applications

✍ Scribed by Ferrero, S; Porro, S; Giorgis, F; Pirri, C F; Mandracci, P; Ricciardi, C; Scaltrito, L; Sgorlon, C; Richieri, G; Merlin, L

Book ID
120185745
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
714 KB
Volume
14
Category
Article
ISSN
0953-8984

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