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Surface analysis and defect characterization of 4H–SiC wafers for power electronic device applications

✍ Scribed by Scaltrito, L

Book ID: 122364386
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 96 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(02)00310-2

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