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Deep SiC etching with RIE

✍ Scribed by M. Lazar; H. Vang; P. Brosselard; C. Raynaud; P. Cremillieu; J.-L. Leclercq; A. Descamps; S. Scharnholz; D. Planson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Deep Si etch with ICP cryo-RIE

📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 54 KB

Comparison of F2plasma chemistries for d

✍ P. Leerungnawarat; K. P. Lee; S. J. Pearton; F. Ren; S. N. G. Chu 📂 Article 📅 2001 🏛 Springer US 🌐 English ⚖ 720 KB

RIE etching of deep trenches in Si using

✍ A.M. Krings; K. Eden; H. Beneking 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 303 KB

Deep single step vertical ICP–RIE etchin

✍ Messow, Ferdinand; Welch, Colin; Eifert, Alexander; Ang, Wei Chung; Hoe, Nee Shi 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 565 KB

Improving the Anti-seizure Ability of Si

✍ Xiaolei Wang; Koji Kato 📂 Article 📅 2003 🏛 Springer US 🌐 English ⚖ 679 KB

Cell-wall artefacts associated with deep

✍ Willison, J.H.M. 📂 Article 📅 1975 🏛 Elsevier Science ⚖ 379 KB