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Deep Si etch with ICP cryo-RIE

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Deep SiC etching with RIE

✍ M. Lazar; H. Vang; P. Brosselard; C. Raynaud; P. Cremillieu; J.-L. Leclercq; A. 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 320 KB

Deep single step vertical ICP–RIE etchin

✍ Messow, Ferdinand; Welch, Colin; Eifert, Alexander; Ang, Wei Chung; Hoe, Nee Shi 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 565 KB

RIE etching of deep trenches in Si using

✍ A.M. Krings; K. Eden; H. Beneking 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 303 KB

ICP-RIE etching of self-aligned InP base

✍ S. Topaloglu; W. Prost; F.-J. Tegude 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 739 KB

Anisotropic Si deep beam etching with pr

✍ H. Zou 📂 Article 📅 2004 🏛 Springer-Verlag 🌐 English ⚖ 320 KB