✦ LIBER ✦
ICP-RIE etching of self-aligned InP based HBTs with Cl2/N2 chemistry
✍ Scribed by S. Topaloglu; W. Prost; F.-J. Tegude
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 739 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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