𝔖 Bobbio Scriptorium
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Deep range profiling by Rutherford backscattering and nuclear reaction analysis

✍ Scribed by P. Oberschachtsiek; V. Schüle; R. Günzler; M. Weiser; S. Kalbitzer


Book ID
113281181
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
831 KB
Volume
45
Category
Article
ISSN
0168-583X

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Disorders of N and Ga lattice in GaN, introduced by fast neutron irradiation with a fluence of 6.7 • 10 18 cm À2 , are investigated by nuclear reaction analysis (NRA) using 14 N(d, p) 15 N reaction with 2.6 MeV D þ 2 ions and by Rutherford backscattering (RBS) with 1.5 MeV 4 He + ions. The h0 0 0 1i