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Analysis of TiN by charged particle beams: Nuclear reaction analysis, nuclear reaction broadening and Rutherford backscattering

✍ Scribed by V.H. Rotberg; A.J. Perry; C.C. Strandberg; G. Was


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
501 KB
Volume
166
Category
Article
ISSN
0040-6090

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Disorders of N and Ga lattice in GaN, introduced by fast neutron irradiation with a fluence of 6.7 β€’ 10 18 cm Γ€2 , are investigated by nuclear reaction analysis (NRA) using 14 N(d, p) 15 N reaction with 2.6 MeV D ΓΎ 2 ions and by Rutherford backscattering (RBS) with 1.5 MeV 4 He + ions. The h0 0 0 1i