✦ LIBER ✦
Characterization of Ta2O5 layers by electron spectroscopy for chemical analysis rutherford backscattering spectrometry, nuclear reaction analysis and optical methods
✍ Scribed by K. Gu¨rtler; K. Bange; W. Wagner; F. Rauch; H. Hantsche
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 233 KB
- Volume
- 175
- Category
- Article
- ISSN
- 0040-6090
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