In this paper, the problem of the deconvolution of SIMS depth proΓles is addressed. In particular, the hypotheses that are necessary for the deconvolution to be possible (in the actual state of the art) in the case of the SIMS signal are reviewed. Then, the principle of regularization, which is a ma
β¦ LIBER β¦
Deconvolution of SIMS depth profiles: Towards simple and faster techniques
β Scribed by F. Boulsina; M. Berrabah; J.C. Dupuy
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 505 KB
- Volume
- 255
- Category
- Article
- ISSN
- 0169-4332
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