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Optimization of Zn dopant profiles in a pin-diode/FET by combination of depth profiling techniques: a SIMS, ECV and AES study

✍ Scribed by J.G. Bauer; R. Treichler; T. Hillmer; J. Müller; G. Ebbinghaus


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
284 KB
Volume
50
Category
Article
ISSN
0169-4332

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