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Deconvolution of concentration depth profiles from angle resolved x-ray photoelectron spectroscopy data

✍ Scribed by Bussing, T. D.

Book ID
127256571
Publisher
AVS (American Vacuum Society)
Year
1985
Tongue
English
Weight
880 KB
Volume
3
Category
Article
ISSN
0734-2101

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Restoration of the depth–concentration p
Restoration of the depth–concentration profile from the angle-resolved relative intensities of x-ray photoelectron spectra
✍ Rudolf Jisl πŸ“‚ Article πŸ“… 1990 πŸ› John Wiley and Sons 🌐 English βš– 675 KB

## Abstract A numerical method for the restoration of the depth–concentration profile from the angular distribution of XPS intensities is described. The proposed method is based on the regularization theory. A simpler formulation of the basic relationships than has been given in previous works^2–8^