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A novel approach to angular-resolved X-ray photoelectron spectroscopy depth-profiling

โœ Scribed by A. Stanchev; V. Ignatova; Ch. Ghelev

Book ID
114171812
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
166 KB
Volume
166-167
Category
Article
ISSN
0168-583X

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Aluminium nitride thin รlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e โ€ ect of 5 kV argon ion milling used to remove the hydrolysis layer w