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Uniform Depth Profiling in X-ray Photoelectron Spectroscopy (Electron Spectroscopy for Chemical Analysis)

โœ Scribed by Bradley, L.; Bosworth, Y. M.; Briggs, D.; Gibson, V. A.; Oldman, R. J.; Evans, A. C.; Franks, J.

Book ID
115359191
Publisher
Society for Applied Spectroscopy
Year
1978
Tongue
English
Weight
339 KB
Volume
32
Category
Article
ISSN
0003-7028

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Aluminium nitride thin รlms grown at room temperature on degenerate silicon (conducting) substrates have been studied using XPS. The hydrolysis layer at the surface of the AlN was examined using valence band measurements, and the e โ€ ect of 5 kV argon ion milling used to remove the hydrolysis layer w