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Quantitative surface analysis by X-ray photoelectron spectroscopy and X-ray excited auger electron spectroscopy

✍ Scribed by Ebel, Maria F. ;Ebel, Horst

Publisher
Springer-Verlag
Year
1990
Weight
268 KB
Volume
101
Category
Article
ISSN
0344-838X

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## Abstract X‐ray photoelectron spectroscopy (XPS) and Bremsstrahlung‐excited Auger electron spectroscopy (XAES) were used to study the surface composition and oxidation of silicon carbide platelets which had been heated in air at 500–800Β° C. The surface oxide thickness for each heating time and te