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A theory of quantitative angle-resolved X-ray photoelectron spectroscopy

โœ Scribed by IS Tilinin; A Jablonski; B Lesiak-Orlowska


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
413 KB
Volume
46
Category
Article
ISSN
0042-207X

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Angle-resolved x-ray photoelectron spect
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Coupons of polished aluminium, glass and polystyrene were exposed to radiofrequency (r.f.) plasmas containing helium, nitrogen and oxygen. Angle-resolved XPS measurements of the treated surfaces were made immediately, after a few days and after about 9 months. The data were interpreted in terms of a