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Angle-resolved x-ray photoelectron spectroscopy studies of the evolution of plasma-treated surfaces with time

✍ Scribed by Paynter, R. W.

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 294 KB
Volume: 27
Category: Article
ISSN: 0142-2421
DOI: 10.1002/(sici)1096-9918(199902)27:2<103::aid-sia477>3.0.co;2-1

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✦ Synopsis

Coupons of polished aluminium, glass and polystyrene were exposed to radiofrequency (r.f.) plasmas containing helium, nitrogen and oxygen. Angle-resolved XPS measurements of the treated surfaces were made immediately, after a few days and after about 9 months. The data were interpreted in terms of a simpliÐed substrate-overlayer model with allowance for fractional coverage. The results are consistent with surface cleaning followed by hydrocarbon re-contamination for aluminium and glass, and with the di †usion of adatoms towards the bulk in the case of polystyrene.

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