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Angle-dependent X-ray photoelectron spectroscopy investigation of GaAs surfaces

✍ Scribed by William F. Stickle; Kenneth D. Bomben


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
348 KB
Volume
154
Category
Article
ISSN
0040-6090

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Coupons of polished aluminium, glass and polystyrene were exposed to radiofrequency (r.f.) plasmas containing helium, nitrogen and oxygen. Angle-resolved XPS measurements of the treated surfaces were made immediately, after a few days and after about 9 months. The data were interpreted in terms of a