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CVD of Al2O3 Thin Films Using Aluminum Tri-isopropoxide

✍ Scribed by S. Blittersdorf; N. Bahlawane; K. Kohse-Höinghaus; B. Atakan; J. Müller

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
313 KB
Volume
9
Category
Article
ISSN
0948-1907

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Local Kinetic Modeling of Aluminum Oxide
Local Kinetic Modeling of Aluminum Oxide Metal-Organic CVD From Aluminum Tri-isopropoxide
✍ Hugues Vergnes; Diane Samélor; Alain N. Gleizes; Constantin Vahlas; Brigitte Cau 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 178 KB

A numerical model for the MetalOrganic CVD of alumina from aluminium tri‐isopropoxide (ATI), based on an apparent heterogeneous kinetic law was developed using the Computational Fluid Dynamics (CFD) code Fluent. The kinetic parameters were fitted from experimental deposition rates obtained between 3