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Cubic boron nitride films by d.c. and r.f. magnetron sputtering: layer characterization and process diagnostics

✍ Scribed by Hahn, J.; Friedrich, M.; Pintaske, R.; Schaller, M.; Kahl, N.; Zahn, D.R.T.; Richter, F.

Book ID: 121215617
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 893 KB
Volume: 5
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(95)00507-2

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