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Preparation of W and Mo thin films by r.f.-d.c. coupled magnetron sputtering

✍ Scribed by K. Kawabata; T. Tanaka; H. Kajioka

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 222 KB
Volume: 163
Category: Article
ISSN: 0921-5093
DOI: 10.1016/0921-5093(93)90782-a

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