Cubic boron nitride films prepared by reactive r.f. and d.c. sputtering from different boron containing targets

✍ Scribed by A. Schütze; K. Bewilogua; H. Lüthje; S. Kouptsidis; S. Jäger

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 440 KB
• Volume: 74-75
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(95)08312-x