𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Crystallographic wet chemical etching of GaN

✍ Scribed by Stocker, D. A.; Schubert, E. F.; Redwing, J. M.


Book ID
121794521
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
425 KB
Volume
73
Category
Article
ISSN
0003-6951

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Wet etching for improved GaN-based HBT p
✍ Jennifer A. Bardwell; Soufien Haffouz; Eugene M. Hsu; Haipeng Tang; Peter Chyurl πŸ“‚ Article πŸ“… 2005 πŸ› John Wiley and Sons 🌐 English βš– 189 KB
Opticalin situ monitoring of wet chemica
✍ Waclavek, JΓ‘n; Krausko, Gabriel; Ε kriniarovΓ‘, Jaroslava πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 466 KB πŸ‘ 2 views

Optical in situ monitoring, exploiting the interference of monochromatic radiation reΓ‘ected from the surface being chemically etched and from the deeper interfaces of semiconductor layers, was utilized to monitor the etch process of layered AlGaAs/AlAs/GaAs structures. The described method is applic