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Smooth n-type GaN surfaces by photoenhanced wet etching

✍ Scribed by Youtsey, C.; Adesida, I.; Romano, L. T.; Bulman, G.

Book ID: 121797045
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 394 KB
Volume: 72
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.120758

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