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Crystallization of coevaporated β-FeSi2 thin films

✍ Scribed by M. Powalla; K. Herz


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
567 KB
Volume
70-71
Category
Article
ISSN
0169-4332

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The orthorhombic phase of iron silicide, P-F&i,, is a semiconducting material whose preparation is compatible with silicon processes. Epitaxy on Si has been achieved recently [I]. Its direct gap of 0.85 eV seems to make it suitable