✦ LIBER ✦
Modification of thin SIMOX film into β-FeSi2 via dry processes
✍ Scribed by K. Shimura; K. Yamaguchi; M. Sasase; H. Yamamoto; S. Shamoto; K. Hojou
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 240 KB
- Volume
- 242
- Category
- Article
- ISSN
- 0168-583X
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