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Crystallinity and Photoluminescence Properties of ZnO Films on Zn Buffer Layers Deposited by rf Magnetron Sputtering

✍ Scribed by Lee, Chong Mu; Park, Anna; Cho, Young Joon; Kim, Hyoun Woo; Lee, Jae Gab


Book ID
121863655
Publisher
Trans Tech Publications, Ltd.
Year
2007
Tongue
English
Weight
521 KB
Volume
336-338
Category
Article
ISSN
1662-9795

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec