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Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon

✍ Scribed by Nainaparampil, Josekutty J.; Zabinski, Jeffrey S.

Book ID: 121682522
Publisher: AVS (American Vacuum Society)
Year: 1999
Tongue: English
Weight: 913 KB
Volume: 17
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.581663

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