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Crystal quality improvement of a-plane GaN using epitaxial lateral overgrowth on nanorods

✍ Scribed by Shih-Chun Ling; Chu-Li Chao; Jun-Rong Chen; Po-Chun Liu; Tsung-Shine Ko; Tien-Chang Lu; Hao-Chung Kuo; Shing-Chung Wang; Shun-Jen Cheng; Jenq-Dar Tsay


Book ID
108165986
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
396 KB
Volume
312
Category
Article
ISSN
0022-0248

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Epitaxial lateral overgrowth (ELO) GaN samples were successfully grown on masked sapphire (0 0 0 1) substrates using an in-situ carbonized photoresist (PR) mask by a metalorganic chemical vapor deposition (MOCVD) method. The PR masks for the ELO process were prepared using conventional lithography i