## Abstract High quality nonpolar __a__ βplane GaN templates were grown by utilizing sidewall lateral epitaxial overgrowth (SLEO) technique with threading dislocation density of βΌ10^6^β10^7^ cm^β2^. 360 nm GaN/AlGaN multiple quantum well ultraviolet light emitting diodes were grown with metalorgani
Crystal quality improvement of a-plane GaN using epitaxial lateral overgrowth on nanorods
β Scribed by Shih-Chun Ling; Chu-Li Chao; Jun-Rong Chen; Po-Chun Liu; Tsung-Shine Ko; Tien-Chang Lu; Hao-Chung Kuo; Shing-Chung Wang; Shun-Jen Cheng; Jenq-Dar Tsay
- Book ID
- 108165986
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 396 KB
- Volume
- 312
- Category
- Article
- ISSN
- 0022-0248
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a), T. Tuomi (b), D. Lowney 1 ) (a), K. Jacobs (c), A.N. Danilewsky (d), R. Rantama Β¨ki (b), M. O'Hare (a), and L. Considine (e)
Epitaxial lateral overgrowth (ELO) GaN samples were successfully grown on masked sapphire (0 0 0 1) substrates using an in-situ carbonized photoresist (PR) mask by a metalorganic chemical vapor deposition (MOCVD) method. The PR masks for the ELO process were prepared using conventional lithography i