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Cross-sectional transmission electron microscopy studies for deformation behaviors of AlN thin films under Berkovich nanoindentation

✍ Scribed by Sheng-Rui Jian; G.-J. Chen; H.-G. Chen; Jason S.-C. Jang; Y.-Y. Liao; P.-F. Yang; Y.-S. Lai; M.-R. Chen; H.-L. Kao; J.-Y. Juang

Book ID
116606325
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
328 KB
Volume
504
Category
Article
ISSN
0925-8388

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A novel technique for the preparation of
A novel technique for the preparation of thin films for cross-sectional transmission electron microscopy
✍ Heuer, J. P. ;Howitt, D. G. πŸ“‚ Article πŸ“… 1990 πŸ› Wiley (John Wiley & Sons) 🌐 English βš– 256 KB πŸ‘ 1 views

## Abstract A method is described for the preparation of cross‐sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that