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Cross-Sectional Transmission Electron Microscopy Investigations of RF-Sputtered a-C Films

✍ Scribed by Grünewald, W. ;Ullmann, J.

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
261 KB
Volume
122
Category
Article
ISSN
0031-8965

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A novel technique for the preparation of
A novel technique for the preparation of thin films for cross-sectional transmission electron microscopy
✍ Heuer, J. P. ;Howitt, D. G. 📂 Article 📅 1990 🏛 Wiley (John Wiley & Sons) 🌐 English ⚖ 256 KB 👁 1 views

## Abstract A method is described for the preparation of cross‐sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that