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Critical thickness for growth of epitaxial grains in silicon film deposited on superlattice surface of silicon (111)

✍ Scribed by Kunisuke Maki; Yukichi Shigeta; Toshio Kuroda

Book ID: 107790825
Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 427 KB
Volume: 115
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(91)90806-g

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