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A comparative analysis of the dissociation kinetics models for silane molecules on the surface at epitaxial growth, of silicon films, in vacuum

โœ Scribed by L. K. Orlov; T. N. Smyslova


Book ID
111443435
Publisher
Springer
Year
2006
Tongue
English
Weight
185 KB
Volume
40
Category
Article
ISSN
1063-7826

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