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Kinetics of the decomposition of disilane molecules on a silicon growth surface in vacuum chemical epitaxy

โœ Scribed by N. L. Ivina, T. N. Smyslova


Book ID
120951208
Publisher
Pleiades Publishing
Year
2013
Tongue
English
Weight
344 KB
Volume
7
Category
Article
ISSN
1990-7931

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