A nonisothermal film model for mass-transfer-limited selective epitaxial growth of silicon on patterned surfaces

✍ Scribed by Nathan Desatnik; Bala Subramaniam; Brian E. Thompson

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 661 KB
• Volume: 131
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(93)90211-e