✦ LIBER ✦
Modelling of a high throughput hot-wall reactor for selective epitaxial growth of silicon : Carl Galewski and William G. Oldham. IEEE Transactions on Semiconductor Manufacturing5(3), 169 (1992)
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 115 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0026-2714
No coin nor oath required. For personal study only.