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Growth of AIN thin films on (111) and (100) silicon by pulsed laser deposition in nitrogen plasma ambient

✍ Scribed by Ogawa, Tetsuya; Okamoto, Mitsuo; Khin, Yap Yoke; Mori, Yusuke; Hatta, Akimitsu; Ito, Toshimichi; Sasaki, Takatomo; Hiraki, Akio

No coin nor oath required. For personal study only.

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