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Enhanced dielectric properties of ZrO 2 thin films prepared in nitrogen ambient by pulsed laser deposition

✍ Scribed by Zhu, J; Li, T L; Pan, B; Zhou, L; Liu, Z G


Book ID
118010330
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
316 KB
Volume
36
Category
Article
ISSN
0022-3727

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