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Cosputtered W75C25 thin film diffusion barriers

✍ Scribed by Hwa-Yueh Yang; X.-A. Zhao; M.-A. Nicolet

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 319 KB
Volume: 158
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(88)90301-x

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