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Investigation of cosputtered W-C thin films as diffusion barriers: H Y Yang and X-A Zhao,J Vac Sci Technol,A6, 1988, 1646–1649

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 150 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90772-0

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📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 155 KB