✦ LIBER ✦
Transmission electron microscopy studies of brown and golden titanium nitride thin films as diffusion barriers in very large scale integrated circuits: N Kumar et al, J Vac Sci Technol, A6, 1988, 1602–1608
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 155 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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