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Amorphous thin film diffusion barriers on GaAs and InP

✍ Scribed by W.T. Anderson Jr.; A. Christou; J.E. Davey

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 799 KB
Volume: 104
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(83)90548-5

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