✦ LIBER ✦

Cosputtered W75C25 thin film diffusion barriers: Hwa-Yueh Yang et al,Thin Solid Films,158, 1988, 45–50

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characterization of cosputtered tungsten

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 158 KB

Cosputtered W75C25 thin film diffusion b

✍ Hwa-Yueh Yang; X.-A. Zhao; M.-A. Nicolet 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 319 KB