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Correlation between a-C:H film properties and Ar/CH4 dielectric barrier discharge

✍ Scribed by M.A. Bratescu; Y. Yoshizaki; Y. Suda; Y. Sakai; H. Sugawara; O. Takai

Book ID: 108289062
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 221 KB
Volume: 506-507
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.08.145

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