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Structure and electrical properties of a-C∶H films deposited from CH4decomposition in a low frequency discharge

✍ Scribed by Y. Segui; B. Mebarki; C. Laurent; A. Bennani

Book ID
112771358
Publisher
Springer
Year
1996
Tongue
English
Weight
625 KB
Volume
1
Category
Article
ISSN
1084-0184

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Versatile properties of nanocrystalline
Versatile properties of nanocrystalline diamond films deposited in Ar/H2/CH4microwave discharges as a function of process parameters
✍ Monéger, D. ;Bénédic, F. ;Sarry, F. ;Renard, P. ;Azouani, R. ;Elmazria, O. ;Silv 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 255 KB

## Abstract In this paper, we discuss on the versatility of nanocrystalline diamond (NCD) film properties as a function of the process parameters aiming to properly fulfil the requirements for various applications. NCD films are achieved in Ar/H~2~/CH~4~ microwave discharges. Their characteristics