✦ LIBER ✦

Copper(I) precursors for chemical vapor deposition of copper metal

✍ Scribed by Kumar, Ravi; Fronczek, Frank R.; Maverick, Andrew W.; Lai, W. Gilbert; Griffin, Gregory L.

Book ID: 127263037
Publisher: American Chemical Society
Year: 1992
Tongue: English
Weight: 852 KB
Volume: 4
Category: Article
ISSN: 0897-4756
DOI: 10.1021/cm00021a016

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Copper(I) tert -Butyl 3-Oxobutanoate Com

Copper(I) tert -Butyl 3-Oxobutanoate Complexes as Precursors for Chemical Vapor Deposition of Copper

✍ Choi, Hyungsoo; Hwang, Soontaik 📂 Article 📅 1998 🏛 American Chemical Society 🌐 English ⚖ 39 KB

Metal—organic chemical vapor deposition

Metal—organic chemical vapor deposition of copper using hydrated copper formate as a new precursor

✍ Marie-José Mouche; Jean-Luc Mermet; Maurice Romand; Marlène Charbonnier 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 603 KB

Incubation time for chemical vapor depos

Incubation time for chemical vapor deposition of copper from hexafluoroacetylacetonate–copper(I)–vinyltrimethoxysilane

✍ Lu-Sheng Hong; Muh-Gueng Jeng 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 286 KB

The incubation time in a metal-organic chemical vapor deposition MOCVD system using copper I -hexafluoroace-Ž Ž .Ž .. tylacetonate vinyltrimethoxysilane Cu hfac VTMOS as the precursor to grow copper films has been investigated. For film deposition on a TiNrSi substrate in the presence of H at 473 K,

Precursor development for the chemical v

Precursor development for the chemical vapor deposition of aluminium, copper and palladium

✍ A. Gräfe; R. Heinen; F. Klein; Th. Kruck; M. Scherer; M. Schober 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 760 KB

Chemical vapor deposition of copper from

Chemical vapor deposition of copper from 1,5-cyclooctadiene copper(I) hexafluoroacetylacetonate

✍ Reynolds, Scott K.; Smart, Christopher J.; Baran, Emil F.; Baum, Thomas H.; Lars 📂 Article 📅 1991 🏛 American Institute of Physics 🌐 English ⚖ 510 KB

Mechanisms of copper chemical vapor depo

Mechanisms of copper chemical vapor deposition

✍ Cohen, Susan L.; Liehr, Michael; Kasi, Srinandan 📂 Article 📅 1992 🏛 American Institute of Physics 🌐 English ⚖ 685 KB