✦ LIBER ✦

Chemical vapor deposition of copper from 1,5-cyclooctadiene copper(I) hexafluoroacetylacetonate

✍ Scribed by Reynolds, Scott K.; Smart, Christopher J.; Baran, Emil F.; Baum, Thomas H.; Larson, Carl E.; Brock, Phillip J.

Book ID: 121530836
Publisher: American Institute of Physics
Year: 1991
Tongue: English
Weight: 510 KB
Volume: 59
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.106060

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Chemical Vapor Deposition of Copper from

Chemical Vapor Deposition of Copper from Copper (II) Hexafluoroacetylacetonate

✍ Temple, D. 📂 Article 📅 1989 🏛 The Electrochemical Society 🌐 English ⚖ 545 KB

Electronic Structure of 1,5-Cyclooctadie

Electronic Structure of 1,5-Cyclooctadiene-copper(I)-hexafluoroacetylacetonate

✍ Bulusheva, L. G.; Okotrub, A. V.; Liskovskaya, T. I.; Krupoder, S. A.; Gusel'nik 📂 Article 📅 2001 🏛 American Chemical Society 🌐 English ⚖ 98 KB

Incubation time for chemical vapor depos

Incubation time for chemical vapor deposition of copper from hexafluoroacetylacetonate–copper(I)–vinyltrimethoxysilane

✍ Lu-Sheng Hong; Muh-Gueng Jeng 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 286 KB

The incubation time in a metal-organic chemical vapor deposition MOCVD system using copper I -hexafluoroace-Ž Ž .Ž .. tylacetonate vinyltrimethoxysilane Cu hfac VTMOS as the precursor to grow copper films has been investigated. For film deposition on a TiNrSi substrate in the presence of H at 473 K,

Selective chemical vapor deposition on e

Selective chemical vapor deposition on excimer-laser-patterned polytetrafluoroethylene from hexafluoroacetylacetonate copper (I) vinyltrimethylsilane

✍ W.Lee Perry; A. Jain; T.T. Kodas; M.J. Hampden-Smith 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 487 KB

Selectivity in low pressure chemical vap

Selectivity in low pressure chemical vapor deposition of copper from hexafluoroacetylacetonate-copper(I)-trimethylvinylsilane in the presence of water

✍ Thomas H. Stumm; Hubert van den Bergh 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 601 KB

Vibrational spectra of 1,5-cyclooctadien

Vibrational spectra of 1,5-cyclooctadiene, di-μ-chlorobis[(1,5-cyclooctadiene)rhodium(I)], di-μ-chlorobis[(1,5-cyclooctadiene)copper(I)] and bis(1,5-cyclooctadiene)copper(I) perchlorate

✍ Gabriel G. Barna; Ian S. Butler 📂 Article 📅 1978 🏛 John Wiley and Sons 🌐 English ⚖ 450 KB