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Chemical Vapor Deposition of Copper from Copper (II) Hexafluoroacetylacetonate

✍ Scribed by Temple, D.

Book ID: 121362084
Publisher: The Electrochemical Society
Year: 1989
Tongue: English
Weight: 545 KB
Volume: 136
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2096498

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