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Copper Oxide Thin Films Prepared from Copper Dipivaloylmethanate and Oxygen by Chemical Vapor Deposition

✍ Scribed by Maruyama, Toshiro


Book ID
127158739
Publisher
Institute of Pure and Applied Physics
Year
1998
Tongue
English
Weight
513 KB
Volume
37
Category
Article
ISSN
0021-4922

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## Abstract Cu~2~O thin films were grown on sapphire (0001) and MgO (100) substrates by chemical vapor deposition. The crystalline, vibrational and electrical properties of the layers and the amount of incorporated background impurities have been examined. X‐ray diffraction measurements revealed, t