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Control and monitoring of growth of chromium nitride coatings using in-situ spectroscopic ellipsometry

✍ Scribed by S.M Aouadi; T.Z Gorishnyy; D.M Schultze; S.L Rohde

Book ID
108422985
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
185 KB
Volume
153
Category
Article
ISSN
0257-8972

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## Abstract We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in‐situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an