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In-situ spectroscopic ellipsometry: optimization of monitoring and closed-loop-control procedures

✍ Scribed by Humlíček, J.

Publisher: John Wiley and Sons
Year: 2008
Tongue: English
Weight: 353 KB
Volume: 205
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200777798

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✦ Synopsis

Abstract

We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in‐situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond‐like carbon on TiCN/steel substrate. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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